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Ultrahigh Vacuum, Chemical Vapor Deposition
Chemical vapor deposition (CVD) is a process often used in the semiconductor industry to grow layers of high-purity solid material on top of a wafer substrate. CVD is achieved using many different techniques and across a range of pressures from atmospheric to ultrahigh vacuum (UHV/CVD). ... Читать дальше
Rotating Plate in a Unidirectional Molecular Flow
This model computes the particle flux, number density and pressure on the surface of a plate that rotates in a highly directional molecular flow. The results obtained are compared with those from other, approximate, techniques for computing molecular flows. Читать дальше
Differential Pumping
Differentially pumped vacuum systems use a small orifice or tube to connect two parts of a vacuum system that are at very different pressures. Such systems are necessary when processes run at higher pressures and are monitored by detectors that require UHV for operation. In this model, ... Читать дальше
Molecular Flow in an Ion-Implant Vacuum System
The Ion Implanter Evaluator app considers the design of an ion implantation system. Ion implantation is used extensively in the semiconductor industry to implant dopants into wafers. Within an ion implanter, ions generated within an ion source are accelerated by an electric field to ... Читать дальше
Molecular Flow Through an S-Bend
This model computes the transmission probability through an s-bend geometry using both the angular coefficient method available in the Free Molecular Flow interface and a Monte Carlo method using the Mathematical Particle Tracing interface. The computed transmission probability by the ... Читать дальше
Evaporator
This model shows how to compute the thickness of a thermally evaporated gold film. The thickness of the deposited film is computed both on the walls of the chamber and on the sample. Читать дальше
Molecular Flow Through an RF Coupler
This model computes the transmission probability through an RF coupler using both the angular coefficient method available in the Free Molecular Flow interface and a Monte Carlo method using the Mathematical Particle Tracing interface. The computed transmission probability determined by ... Читать дальше
Adsorption and Desorption of Water in a Load Lock Vacuum System
This model shows how to simulate the time-dependent adsorption and desorption of water in a vacuum system at low pressures. The water is introduced into the system when a gate valve to a load lock is opened and the subsequent migration and pumping of the water is modeled. Читать дальше
Neutralization of a Proton Beam Through a Charge Exchange Cell
Gas cells have several applications in the design of scientific instruments. A gas cell is used to define a high-pressure region within the instrument's main vacuum system. For example, in this application, note we are designing a high-pressure region 100 mm long, with an operating ... Читать дальше
Molecular Flow Through a Microcapillary
Computing molecular flows in arbitrary geometries produces complex integral equations that are very difficult to compute analytically. Analytic solutions are, therefore, only available for simple geometries. One of the earliest problems solved was that of gas flow through tubes of ... Читать дальше