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Deposition rate using particle tracing module
Posted Oct 15, 2012, 3:39 a.m. EDT Fluid & Heat, Results & Visualization Version 4.3 1 Reply
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I have modeled a reactor using the "fluid flow" and "particle tracing module". A substrate wafer is placed across the flow channel. I have implemented the boundary condition so that whenever a particle hits the wafer, it get stick/freeze with the wafer wall.
Now, If I want to calculate how many particles are stick with the wafer wall and rate of deposition from the result section, how I am supposed to do that?
Thank you.
Rokib
Hello Md Rokibul Islam
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Did you find the answer to your question. I am thinking of modeling my chemical vapor deposition process on similar lines.
Thank you,
Sanket